JPH01118435U - - Google Patents
Info
- Publication number
- JPH01118435U JPH01118435U JP1258388U JP1258388U JPH01118435U JP H01118435 U JPH01118435 U JP H01118435U JP 1258388 U JP1258388 U JP 1258388U JP 1258388 U JP1258388 U JP 1258388U JP H01118435 U JPH01118435 U JP H01118435U
- Authority
- JP
- Japan
- Prior art keywords
- optical system
- projection lens
- exposure apparatus
- wavelength plate
- target mark
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims 6
- 239000000203 mixture Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 230000010287 polarization Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1258388U JPH01118435U (en]) | 1988-02-03 | 1988-02-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1258388U JPH01118435U (en]) | 1988-02-03 | 1988-02-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01118435U true JPH01118435U (en]) | 1989-08-10 |
Family
ID=31222148
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1258388U Pending JPH01118435U (en]) | 1988-02-03 | 1988-02-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01118435U (en]) |
-
1988
- 1988-02-03 JP JP1258388U patent/JPH01118435U/ja active Pending
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